Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):563-569. Published online: Nov, 30, -0001

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DEGRADATION OF Zn$_3$$N_2$ FILMS PREPARED BY REACTIVE RF MAGNETRON SPUTTERING

  • Futsuhara, Masanobu;Yoshioka, Katsuaki;Takai, Osamu;
    Department of Materials Processing Engineering, School of Engineering, Nagoya University, Paint Design Institute, Nippon Paint Co., Ltd.;Paint Design Institute, Nippon Paint Co., Ltd.;Department of Materials Processing Engineering, School of Engineering,
Abstract

Degradation of $Zn_3N_2$ films is studied by using several analytical techniques. Polycrystalline $Zn_3N_2$ films prepared by reactie rf magnetron sputtering are kept in the air. Electrical and optical properties are measured by usin

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