Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):585-592. Published online: Nov, 30, -0001

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EFFECTS OF GAS PRESSURES ON GRANULAR STRUCTURE`S FOR MATION OF ALUMINUM FILMS PREPARED BY PVD PROCESS

  • Lee, Myeong-hoon;
    Korea Maritime University;
Abstract

In order to investigate the influence of gas pressure in PVD deposition conditions, aluminum films were prepared by vacuum evaporation and ion plating. The crystal orientation and morphology of the films affected by argon gas pressures were characterized

Keywords