Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(6); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(6):644-647. Published online: Nov, 30, -0001

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IMPROVEMENT OF DISTRIBUTION OF COERCIVITY IN CO-CR FILMS DEPOSSSITED BY FACING TARGETS SPUTTERING

  • Takayama, Seiryu;Nakagawa, Shigeki;Kim, Kyung-Hwan;Naoe, Masahiko;
    Dept. of Physical Electronics, Tokyo Institute of Technology;Dept. of Physical Electronics, Tokyo Institute of Technology;Dept. of Electrical Electronics, Kyung Won University;Dept. of Physical Electronics, Tokyo Institute of Technology;
Abstract

The distribution of coercivity in the thickness direction were investigated by using Kerr hysteresis loop tracer for the Co-Cr films deposited by Facing Targets Sputtering apparatus. It was found that the difference between the coercivities of surface lay

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