Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(6); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(6):660-665. Published online: Nov, 30, -0001

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OPTICAL PROPERTIES OF INDIUM OXIDE AND INDIUM TIN OXIDE FILMS PREP ARED BY SPUTTERING

  • Fujita, Yasuhiko;Kitakizaki, Kaoru;
    Department of Electronic Systems Engineering, Tokyo Metropolitan Institute of Technology;Research Development Headquarters, Meidensha Corporation;
Abstract

Thin films of indium oxide and indium tin oxide have been prepared by d.c. magnetron sputtering onto the fused silica substrates kept at 90, 200 and $300^{circ}C$. In order to elucidate the optical absorption process in low energy region below

Keywords