Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(6); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(6):829-833. Published online: Nov, 30, -0001

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COMPOSITION OF SUPERCONDUCTING YBCO THIN FILMS WITH RF REACTIVE SPUTTERING CONDITIONS

  • Kim, H.H.;Kim, S.;Shin, S.H.;Park, J.I.;Park, K.J.;
    Department of Electronic Engineering, Doowon Institute of Technology;Inorganic Chemistry Department, National Institute of Technology and Quality;Inorganic Chemistry Department, National Institute of Technology and Quality;Inorganic Chemistry Department,
Abstract

Superconducting YBaCuO thin films were deposited on MgO (100) single crystal substrate by rf reactive sputtering method. Sputtering target was prepared by mixing the original powders of $Y_2O_3$, $BaCO_3$, and CuO at $830^{circ}

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