Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(6); 1996
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1996;29(6):834-838. Published online: Nov, 30, -0001

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PLASMA DIAGNOSIS OF FANING TARGETS SPUTTERING SYSTEM FOR DEPOSITION OF BA FERRITE FILMS IN Ar, Xe AND $O_2$ GAS MIXTURE

  • Matsushita, Nobuhiro;Noma, Kenji;Nakagawa, Shigeki;Naoe, Masahiko;
    Dept. of Physical Electronics, Tokyo Institute of Technology;Dept. of Physical Electronics, Tokyo Institute of Technology;Dept. of Physical Electronics, Tokyo Institute of Technology;Dept. of Physical Electronics, Tokyo Institute of Technology;
Abstract

The diagnosis of the plasma in the facing targets sputtering system was performed in mixture gas of Ar 0.18-0.0 Pa, Xe 0.0-0.18 Pa and $O_2$ 0.02 Pa by using Langmiur`s probe and the effect of plasma-damage to surface smoothness and magnetic c

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