Oct, 31, 2024

Vol.57 No.5

Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 30(1); 1997
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1997;30(1):63-68. Published online: Nov, 30, -0001

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Thermal Annealing Effects on the Structural and Optical Properties of Sputtered TiO$_2$ Films

  • 박성진;이수일;오수기;
    아주대학교 금속공학과;아주대학교 금속공학과;아주대학교 금속공학과;
Abstract

The effects of the post-deposition annealing on the structural optical properties of sputtered $TiO_2$ thin films were studied; annealing was carried out in air up to $1000^{circ}C$ for different duration. The results of the X-ray di

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