Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 30(4); 1997
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1997;30(4):231-238. Published online: Nov, 30, -0001

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Electrohemical and optical properties of Ta$_2$O$_5$ thin film electrolyte EC windows

  • 김용혁;백지흠;조원일;윤경석;박인철;주재백;
    한국과학기술연구원 화공연구부;한국과학시술원 화공연구부;한국과학시술원 화공연구부;한국과학시술원 화공연구부;(현)현대전자 TFT-LCD;홍익대학교 공과대학 화학공학과;
Abstract

Tantalum oxide thin filme has an amorphous structure and a high resistivity. Its stoichiometric structure was $Ta_2O_{5.3}$ and the transmission ratio was 80%. The high resistivity of $Ta_2O_{5.3}$ thin film electrolyte made an EC w

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