Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 30(4); 1997
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1997;30(4):255-261. Published online: Nov, 30, -0001

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Effect of Doping on the Ionic Conductivity of Li$_2$Po$_{4-x}$N$_{x}$ thin Film

  • 이재혁;이유기;박종완;
    한양대학교 금속공학과;한양대학교 금속공학과;한양대학교 금속공학과;
Abstract

Thin film batteries can be used as a micro power source for electronic in which minute power is needed. In this study, lithium phosphorous oxynitride(LIPON) thin films were deposited as an eletrolyte for lithium ion batteries using RF magentron sputtering

Keywords