Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 30(5); 1997
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1997;30(5):298-309. Published online: Nov, 30, -0001

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The Effect of Processing Parameters on the Mechanical Properties of TiN Films by the Pulsed DC PACVD

  • 김진관;변응선;백운승;이구현;제창웅;윤재홍;이상로;
    현제 현대전자 반도체 2연규소 FAB실 근무;한국기계연구원;한국기계연구원;한국기계연구원;창원기능대학;창원대학교 재료공학과;한국기계연구원;
Abstract

Hard Tin coating on tool steel substrate were prepared using the pulsed PACVE. An orthogonal experimental design was employed to find the best deposition conditions for TiN coating and to systematically understand the effect of processing parameters. The

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