Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 30(6); 1997
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1997;30(6):374-381. Published online: Nov, 30, -0001

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Interface effects on the annealing behavior of tungsten silicide

  • 진원화;오상헌;이재갑;임인곤;김근호;이은구;홍해남;
    국민대학교 금속재료공학부;국민대학교 금속재료공학부;국민대학교 금속재료공학부;LG종합기술원;LG종합기술원;조선대학교 재료공학과;국방과학연구소;
Abstract

We have studied the effect of the interface between tungsten silicide and polysilicon the silicide reaction. The results showed that the cleaning of the silicon surface prior to the deposition of tungsten silicide affected the interface properties, thereb

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