Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 31(2); 1998
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1998;31(2):109-116. Published online: Nov, 30, -0001

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Electrical and Optical Properied of Tin Oxide Films Prepared by Ozone Assisted-MOCVD

  • 배정운;이상운;송국현;박정일;박광자;염근영;
    성균관대학교 재료공학과;명지대학교 화학과;국림기술품질원 무기화학과;국림기술품질원 무기화학과;국림기술품질원 무기화학;성균관대학교 재료공학과;
Abstract

Highly transparent conductive pure and fluorine-doped tin oxide(FT0, $SnO_2$ : F) films have been prepared by low pressure metal organic chemical vapor deposition (LP-MOCVD) from various mixtures of tetramethyitin(TMT) with oxygen or oxygen con

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