Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 31(4); 1998
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1998;31(4):217-222. Published online: Nov, 30, -0001

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Crystal Orientation of Thin Films Prepared by Facing Targets Sputtering

  • 김경환;손인환;송기봉;신촌수양;중천무수;직강정언;
    경원대학교 전기·전자공학부;광운대학교 전기공학과;코오롱중앙연구소;주우3M-일본;동경공업대학 전자물리공학;동경공업대학교;
Abstract

The Facing Targets Sputtering(FTS) system has several advantages for preparing films over a wide range of working gas pressure on plasma-free substrates. Co-Cr thin films seem to be one of the most promising media for perpendicular magnetic recording syst

Keywords