Oct, 31, 2024

Vol.57 No.5

Current Issue Archives
Search
Advanced Search
Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 31(6); 1998
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1998;31(6):345-358. Published online: Nov, 30, -0001

PDF

Evolution of surface morphology and roughness in Si and $_{0.7}$Ge$_{0.3}$ thin fimls

  • 이내웅;
    성균관대학교,금속·재료공학과;
Abstract

The evolution of surface roughness and morphology in epitaxial Si and $Si_{0.7}Ge{0.3}$ alloys grown by UHV opm-beam sputter deposition onto nominally-singular, [100]-, and [110]-mi-scut Si(001) was investigated by stomic force microscopy and t

Keywords