Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(1); 1999
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1999;32(1):3-9. Published online: Nov, 30, -0001

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A Study on the Electrical Properties of Pt Thin film RTD for Temperature Sensor

  • 문중선;정광진;최성호;조동율;천희곤;
    울산대학교 재료, 금속 공학부;울산대학교 재료, 금속 공학부;울산대학교 재료, 금속 공학부;울산대학교 재료, 금속 공학부;울산대학교 재료, 금속 공학부;
Abstract

Pt thin film of about 7000$AA$ thickness was deposited on the alumina substrate using DC Magnetron Sputter and the characteristics of the film for temperature sensor were investigated. When film of about 7000$AA$ thickness was deposi

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