Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(3); 1999
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1999;32(3):235-238. Published online: Nov, 30, -0001

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ANALYSIS OF THE ANODIC OXIDATION OF SINGLE CRYSTALLINE SILICON IN ETHYLEN GLYCOL SOLUTION

  • Yuga, Masamitsu;Takeuchi, Manabu;
    Graduate School of Science and Engineering, Ibaraki University;Department of Electrical and Electronic Engineering, Ibaraki University;
Abstract

Silicon dioxide films were prepared by anodizing silicon wafers in an ethylene $glycol+HNO_3(0.04{;}N)$ at 20 to $70^{circ}C$. The voltage between silicon anode and platinum cathode was measured during this process. Under the constan

Keywords Anodic Oxidation;Silicon Wafers;Ethylene Glycol;X-ray Photoelectron Spectroscopy;Depth Profile of Oxide Film;