Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(3); 1999
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1999;32(3):433-439. Published online: Nov, 30, -0001

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PROPERTIES OF Mo COMPOUNDS AS A DIFFUSION BARRIER BETWEEN Cu AND Si PREPARED BY CO-SPUTTERING

  • Lee, Yong-Hyuk;Park, Jun-Yong;Bae, Jeong-Woon;Yeom, Geun-Young;
    Department of Materials Engineering, SungKyunKwan University;Department of Materials Engineering, SungKyunKwan University;Department of Materials Engineering, SungKyunKwan University;Department of Materials Engineering, SungKyunKwan University;
Abstract

In this study, the diffusion barrier properties of $1000AA$ thick molybdenum compounds (Mox=1-5 Si) were investigated using sheet resistance measurements, X-ray diffractometry (XRD), and Rutherford back scattering spectrometry (RBS). Each barri

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