Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(3); 1999
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1999;32(3):461-466. Published online: Nov, 30, -0001

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DIAMOND-LIKE CARBON FILMS FOR ANTIREFLECTION COATINGS OF GERMANIUM INFRATED OPTICAL LENSES

  • Kim, Seong-Young;Lee, Sang-Hyun;Lee, Jai-Sung;
    Advanced Consumer Products R&D Center, KITECH;Depart. of Metallurgy and Materials Science, Hanyang University;Depart. of Metallurgy and Materials Science, Hanyang University;
Abstract

Diamond-like carbon(DLC) films were directly deposited onto germanium(Ge) witness pieces and lenses by a capacitively coupled 13.56 MHz RF glow discharge plasma with $CH_4$ gas. The characterizations of DLC films were measured using a Raman and

Keywords PECVD;Diamond like carbon;IR transmittance;antireflection;durability;