Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(4); 1999
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1999;32(4):513-520. Published online: Nov, 30, -0001

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A study on the effects of variously configured magnets on the characteristics of inductively coupled plasma

  • 황순원;이영준;유지범;이재찬;염근영;
    성균관대학교 재료공학과;성균관대학교 재료공학과;성균관대학교 재료공학과;성균관대학교 재료공학과;성균관대학교 재료공학과;
Abstract

In this study, we investigated the effects of variously configured magnets on the characteristics of the plasmas to enhance plasma uniformity and density of an inductively coupled plasma source. As the magnets, Helmholtz type axial electromagnets and vari

Keywords