Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(6); 1999
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1999;32(6):658-664. Published online: Nov, 30, -0001

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Characterization of a Helicon Plasma Source

  • 현준원;노승정;김경례;김창연;김현후;
    단국대학교 응용물리학과;단국대학교 응용물리학과;단국대학교 응용물리학과;단국대학교 응용물리학과;두원공과대학 전자공학과;
Abstract

Helicon sources are attractive for plasma processing because they provide high plasma density in low magnetic fields. Helicon waves were excited by a Nagoya type III antenna in a magnetized plasma column. Plasma parameters were measured with a double prob

Keywords