Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(6); 1999
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 1999;32(6):671-676. Published online: Nov, 30, -0001

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Control of ITO/PET Thin Films Depending on the Ratio of Oxygen Partial Pressure in Sputter

  • 김현후;신재혁;신성호;박광자;
    두원공대 전자과;기술표준원 무기화학과;기술표준원 무기화학과;기술표준원 무기화학과;
Abstract

ITO (indium tin oxide) thin films on PET (polyethylene terephthalate) substrate have been deposited by a dc reactive magnetron sputtering without heat treatments such as substrate heater and post heat treatment. Each sputtering parameter during the sputte

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