Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(1); 2001
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2001;34(1):10-16. Published online: Nov, 30, -0001

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A Study on Surface Etching of Metallic Co and Mo in R.F. Plasma

  • 서용대;김용수;정종헌;오원진;
    한양대학교 원자력공학과;한양대학교 원자력공학과;한국원자력연구소;한국원자력연구소;
Abstract

Recently plasma etching research has been focused on the metal surfaces in the nuclear industry. In this study, surface etching reaction of metallic Co and Mo, principal contaminants in the spent nuclear components, in CF$_4$/O$_2$,

Keywords