Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(2); 2001
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2001;34(2):89-96. Published online: Nov, 30, -0001

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Effect of $N_2$ and $O_2$ Properties of STS304 Stainless Steel Films Synthesized by Unbalanced Magnetron Sputtering Process

  • 김광석;이상율;김범석;한전건;
    한국항공대학교 항공재료공학과;한국항공대학교 항공재료공학과;한국항공대학교 항공재료공학과;성균관대학교 플라즈마 응용 표면기술센터;
Abstract

N- or O-doped STS304 stainless films were synthesized by an unbalanced magnetron sputtering process with various argon and reactive gas ($N_2$, $O_2$) mixtures. These films were examined by scanning electron microscopy (SEM), X-ray d

Keywords