Oct, 31, 2024

Vol.57 No.5

Current Issue Archives
Search
Advanced Search
Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(2); 2001
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2001;34(2):97-104. Published online: Nov, 30, -0001

PDF

The Microstructure And The Mechanical Properties Of(Ti$_{1-x}$AI$_{x}$)N Coatings Deposited By Plasma Enhanced Chemical Vapor Deposition(PECVD)

  • Lee, D.K.;Lee, S.H.;Y.H. Han;Lee, J.J.;
    School of Materials and Engineering, Seoul National University;School of Materials and Engineering, Seoul National University;School of Materials and Engineering, Seoul National University;School of Materials and Engineering, Seoul National University;
Abstract

($Ti_{ 1-x}$$Al_{ x}$)N has been deposited on high speed steel (HSS) substrate using PECVD from the gas mixture of $TiC1_4$, $AlC1_4$, $NH_3$, $H_2$, and Ar. The correlation between the mic

Keywords