Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(2); 2001
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2001;34(2):105-114. Published online: Nov, 30, -0001

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A Study on the Properties of $Al_2$ $O_3$ and $Al_2$ $O_3$/( $Ti_{0.5}$ $Al_{0.5}$)N Coatings Produced by Plasma Enhanced Chemical Vapor Deposition

  • 손경석;이승훈;이동각;임주완;이후철;이정중;
    현대전자;서울대학교 재료공학부;서울대학교 재료공학부;서울대학교 재료공학부;서울대학교 재료공학부;서울대학교 재료공학부;
Abstract

$Al_2$$O_3$ coatings were deposited on M2 high speed steels by the plasma enhanced chemical vapor deposition (PECVD) process, using a gas mixture of AlC1$_3$, $H_2$, $CO_2$ and Ar $Al_2$

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