Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(1); 2002
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2002;35(1):33-38. Published online: Nov, 30, -0001

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Nucleation and growth mechanism of nitride films deposited on glass by unbalanced magnetron sputtering

  • 정민재;남경훈;한전건;
    성균관대학교 금속재료공학부 플라즈마응용표면기술연구센터;성균관대학교 금속재료공학부 플라즈마응용표면기술연구센터;성균관대학교 금속재료공학부 플라즈마응용표면기술연구센터;
Abstract

For the evaluation of nucleation and growth behaviors influenced by substrate properties, such as surface energy, structure and electrical properties, chromium nitride films (CrN) were deposited on various substrates (glass, AISI 1040 steel and Si (110) b

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