Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(2); 2002
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2002;35(2):107-112. Published online: Nov, 30, -0001

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A Study on Diffusion Behavior in NiFe/Ag Bilayer Films deposited by ion Beam Sputtering Methods

  • 지재범;이성래;문대원;
    고려대학교 재료공학부;고려대학교 재료공학부;한국표준과학연구원;
Abstract

We have studied diffusion behavior of NiFe/Ag bilayer deposited by on silicon Ion Beam Sputtering methods. The diffusion behavior of NiFe and Ag in NiFe/Ag thin film is analyzed by Medium Energy Ion Scattering Spectroscopy. For samples without Ta underlay

Keywords