Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(2); 2002
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2002;35(2):113-121. Published online: Nov, 30, -0001

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Insulation Properties and Microstructure of SiO$_2$ Film Prepared by rf Magnetron Sputtering

  • 박태순;이성래;
    고려대학교 재료공학부;고려대학교 재료공학부;
Abstract

We have investigated insulating properties of $SiO_2$ interlayer for the thin film strain gauge, which were prepared by RF magnetron sputtering method in various deposition conditions, such as Ar pressure, gas flow rates and sputtering gases. S

Keywords