Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(2); 2002
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2002;35(2):122-128. Published online: Nov, 30, -0001

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Deposition of Diamond Like Carbon Thin Films by PECVD

  • 김상호;김동원;
    한국기술교육대학교 신소재공학과;경기대학교 재료공학과;
Abstract

This study was conducted to synthesize the diamond like carbon films by plasma enhanced chemical vapor deposition (PECVD). The effects of gas composition on growth and mechanical properties of the films were investigated. A little amount of hydrogen or ox

Keywords