Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(3); 2002
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2002;35(3):127-132. Published online: Nov, 30, -0001

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High speed performance of Pb(Zr,Ti)O$_3$ capacitors through lattice engineering

  • Yang, B.L.;
    Memory R&D Division, Hynix Semiconductor Inc.;
Abstract

High speed performance of ferroelectric Pb(Zr,Ti)$O_3$ (PZT) based capacitors is reported. La substitution up to 10% was performed to systematically lower the coercive and saturation voltages of epitaxial ferroelectric capacitors grown on Si us

Keywords hydrogen-terminated;ferroelectric;high speed;lattice;domin;