Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(3); 2002
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2002;35(3):133-140. Published online: Nov, 30, -0001

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Synthesis and Mechanical Properties of nc-TiN/a-Si$_3$N$_4$ Nanocomposite Coating Layer

  • 김광호;윤석영;김수현;이건환;
    부산대학교 재료공학부;부산대학교 재료공학부;부산대학교 재료공학부;한국기계연구원 표면기술연구부;
Abstract

The Ti-Si-N coating layers were synthesized on SKD 11 steel substrate by a DC reactive magnetron co-sputtering technique with separate Ti and Si targets. The high resolution transmission electron microscopy (HRTEM) and X-ray photoelectron spectroscopy (XP

Keywords Ti-Si-N;Nanocomposite;Hardness;Wear;