Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(6); 2002
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2002;35(6):377-382. Published online: Nov, 30, -0001

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Wet Cleaning Process for Cobalt Salicide

  • 정성희;송오성;
    서울시립대학교 신소재공학과;서울시립대학교 신소재공학과;
Abstract

We investigated the appropriate wet cleaning process for Co-Ti-Si compounds formed on top of cobalt disilicide made from Co/Ti deposition and two rapid thermal annealing (RTA). We employed three wet cleaning processes, WP1 ($H_2$SO$_4$

Keywords Cobalt Salicide;wet cleaning;CoTiSi compound;Co/Ti silicide;BOE;