Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(6); 2002
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2002;35(6):415-421. Published online: Nov, 30, -0001

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High-temperature oxidation resistance of Ti-Si-N coating layers prepared by DC magnetron sputtering method

  • Choi, Jun-Bo;Ryu, Jung-Min;Cho, Gun;Kim, Kwang-Ho;Lee, Mi-Hye;
    School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineerin
Abstract

Ti-Si-N coating layers were codeposited on silicon wafer substrates by a DC reactive magnetron sputtering technique using separate titanium and silicon targets in $N_2$/Ar gas mixtures. The oxidation behavior of Ti-Si-N coating layers containin

Keywords Ti-Si-N coating layers;DC magnetron sputtering;Oxidation resistance;