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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 36(1); 2003
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2003;36(1):1-8. Published online: Nov, 30, -0001
Microstructure and Residual Stress of Metallic Thin Films According to Deposition Parameters
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Department of Materials Science and Engineering Chonnam National University;Department of Materials Science and Engineering Chonnam National University;
Abstract
In general, the microstructure in thin films was known to evolve in similar manner according to the energy striking the condensing film at similar homologous temperature, Th for the materials of the same crystal structure. The fundamental factors affectin
Keywords Thin film;Stress;Microstructure;Heat treatment;