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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 36(2); 2003
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2003;36(2):109-115. Published online: Nov, 30, -0001
Microstructural and Mechanical Characterization of Nanocomposite Ti-Al-Si-N Films Prepared by a Hybrid Deposition System
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부산대학교 재료공학부;부산대학교 재료공학부;부산대학교 재료공학부;
Abstract
Quaternary Ti-Al-Si-N films were deposited on WC-Co substrates by a hybrid deposition system of arc ion plating (AIP) method for Ti-Al source and DC magnetron sputtering technique for Si incorporation. The synthesized Ti-Al-Si-N films were revealed to be
Keywords Ti-Al-Si-N;Superhardess;Nanocomposite;Hybrid deposition system;