Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 36(2); 2003
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2003;36(2):122-127. Published online: Nov, 30, -0001

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Characterization of Nanocomposite Ti-Si-N Films Prepared by a Hybrid Deposition System of A If and Sputtering Techniques

  • 윤순영;최성룡;이미혜;김광호;
    부산대학교 공과대학 재료공학부;부산대학교 공과대학 재료공학부;기술신용보증기금 기술평가센터;부산대학교 공과대학 재료공학부;
Abstract

Ti - Si - N hard films were deposited on SKD11 steel substrates by a hybrid deposition system, where TiN was deposited by AIP method while Si was incorporated by sputtering one. The microstructure of Ti-Si-N films was revealed to be a composite of TiN cry

Keywords Ti-Si-N;Hybrid deposition system;Superhardness;